| Autor: |
Roufaida Bensalem, Mohannad Y. Elsayed, Hani H. Tawfik, Frederic Nabki, Mourad N. El-Gamal |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
Micro, Vol 3, Iss 4, Pp 811-821 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2673-8023 |
| DOI: |
10.3390/micro3040057 |
| Popis: |
This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap movement reduces the capacitance as the actuation voltage increases. The MEMS variable capacitor is fabricated using PolyMUMPs technology and exhibits an excellent linearity factor of 99.7% in capacitance-to-voltage response, and a capacitance tuning ratio of 11× was achieved. The proposed strategy will enable the development of high-performance MEMS-based tunable devices for various applications. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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