Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
Autor: | Hsiang-Chang Hsu, Tso-Sheng Hsieh, Yi-Chian Chen, Hung-En Chen, Liren Tsai, Chia-Chin Chiang |
---|---|
Jazyk: | angličtina |
Rok vydání: | 2017 |
Předmět: |
fiber Bragg grating (FBG)
temperature sensitivity TiN-coated FBG sensor refractive index sensitivity Technology Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85 |
Zdroj: | Materials, Vol 10, Iss 11, p 1297 (2017) |
Druh dokumentu: | article |
ISSN: | 1996-1944 |
DOI: | 10.3390/ma10111297 |
Popis: | The study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were tested using R-soft optical software to simulate the refractive index sensitivity. In these experiments, the temperature sensitivity of the TiN FBG was measured at temperatures ranging from 100 to 500 °C using an optical spectrum analyzer (OSA). The results showed that the temperature sensitivity of the proposed TiN FBG sensor reached 12.8 pm/°C for the temperature range of 100 to 300 °C and 20.8 pm/°C for the temperature range of 300 to 500 °C. Additionally, we found that the produced oxidation at temperatures of 400-500 °C caused a crack, with the crack becoming more and more obvious at higher and higher temperatures. |
Databáze: | Directory of Open Access Journals |
Externí odkaz: |