| Autor: |
Michel Challier, Selda Sonusen, Arne Barfuss, Dominik Rohner, Daniel Riedel, Johannes Koelbl, Marc Ganzhorn, Patrick Appel, Patrick Maletinsky, Elke Neu |
| Jazyk: |
angličtina |
| Rok vydání: |
2018 |
| Předmět: |
|
| Zdroj: |
Micromachines, Vol 9, Iss 4, p 148 (2018) |
| Druh dokumentu: |
article |
| ISSN: |
2072-666X |
| DOI: |
10.3390/mi9040148 |
| Popis: |
Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an approach to conveniently fabricate such thin membranes with up to about one millimeter in size. We use commercially available diamond plates (thickness 50 μ m) in an inductively coupled reactive ion etching process which is based on argon, oxygen and SF 6 . We thus avoid using toxic, corrosive feed gases and add an alternative to previously presented recipes involving chlorine-based etching steps. Our membranes are smooth (RMS roughness |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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