| Autor: |
Paul Beck, Laura C. Wynne, Simone Iadanza, Liam O’Faolain, Sebastian A. Schulz, Peter Banzer |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
APL Photonics, Vol 8, Iss 4, Pp 046113-046113-7 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2378-0967 |
| DOI: |
10.1063/5.0133968 |
| Popis: |
Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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