Extending the resolution limits of nanoshape imprint lithography using molecular dynamics of polymer crosslinking

Autor: Anshuman Cherala, Parth N. Pandya, Kenneth M. Liechti, S. V. Sreenivasan
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: Microsystems & Nanoengineering, Vol 7, Iss 1, Pp 1-10 (2021)
Druh dokumentu: article
ISSN: 2055-7434
DOI: 10.1038/s41378-020-00225-y
Popis: Abstract Emerging nanoscale applications in energy, electronics, optics, and medicine can exhibit enhanced performance by incorporating nanoshaped structures (nanoshape structures here are defined as shapes enabled by sharp corners with radius of curvature
Databáze: Directory of Open Access Journals