Study of Lapping and Polishing Performance on Lithium Niobate Single Crystals
| Autor: | Karim Ravilevich Muratov, Timur Rizovich Ablyaz, Evgeny Anatolevich Gashev, Sarabjeet Singh Sidhu, Evgeny Sergeevich Shlykov |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
lithium niobate single crystal
abrasive lapping polishing surface roughness deformed layer tool wear Technology Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85 |
| Zdroj: | Materials, Vol 14, Iss 17, p 4968 (2021) |
| Druh dokumentu: | article |
| ISSN: | 1996-1944 |
| DOI: | 10.3390/ma14174968 |
| Popis: | Recently, the range of crystal materials used in industrial microelectronics has significantly increased. Lithium niobate single crystals are most often used in integrated optics, due to the high values of optical and electro-optical coefficients. An integral-optical circuit based on a lithium niobate single crystal is a key element in the production of local high-precision fiber-optic gyroscopic devices used in civil and military aviation and marine technologies. In the process of production of an integral-optical circuit, the most labor-intensive operations are mechanical processing, such as lapping and polishing. Technological problems that arise while performing these operations are due to the physical and mechanical properties of the material, as well as target surface finish. This work shows the possibility to achieve the required surface quality of lithium niobate single crystal plates by mechanization of lapping and polishing process in this article. |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
|