| Autor: |
Jaqueline Stauffenberg, Ingo Ortlepp, Johannes Belkner, Denis Dontsov, Enrico Langlotz, Steffen Hesse, Ivo Rangelow, Eberhard Manske |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
Applied Sciences, Vol 12, Iss 15, p 7843 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2076-3417 |
| DOI: |
10.3390/app12157843 |
| Popis: |
This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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