Optimized Extraction of H– by Three-Electrode Faraday Cup System in Magnetized Sheet Plasma Ion Source

Autor: M. S. Fernandez, Henry Ramos
Jazyk: angličtina
Rok vydání: 2003
Předmět:
Zdroj: Science Diliman, Vol 15, Iss 1, Pp 66-70 (2003)
Druh dokumentu: article
ISSN: 0115-7809
2012-0818
Popis: A locally designed rectangular parallelepiped, three-electrode Faraday cup system has been developed.Its design incorporates the capability of simultaneous extraction and deposition of the H– ions on substrates.The device functions to attain prescribed selectivity conditions of extracted ions, with controlled energies,for deposition or adsorption. It has been proven to detect the ions at filter bias voltage of 13.61 V with acurrent density of 5.3 A/m2 that is relatively higher than reported (Abate & Ramos, 2000).
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