Towards sub-10 nm spatial resolution by tender X-ray ptychographic coherent diffraction imaging

Autor: Nozomu Ishiguro, Fusae Kaneko, Masaki Abe, Yuki Takayama, Junya Yoshida, Taiki Hoshino, Shuntaro Takazawa, Hideshi Uematsu, Yuhei Sasaki, Naru Okawa, Keichi Takahashi, Hiroyuki Takizawa, Hiroyuki Kishimoto, Yukio Takahashi
Jazyk: angličtina
Rok vydání: 2024
Předmět:
Zdroj: Applied Physics Express, Vol 17, Iss 5, p 052006 (2024)
Druh dokumentu: article
ISSN: 1882-0786
DOI: 10.35848/1882-0786/ad4846
Popis: As the first experiment at BL10U in NanoTerasu, tender X-ray ptychographic coherent diffraction imaging (PCDI) was conducted using a photon energy of 3.5 keV. The ptychographic diffraction patterns from a 200 nm thick Ta test chart and a micrometer-sized particle of sulfurized polymer were collected. Subsequently, phase images were reconstructed with resolutions of sub-20 nm and sub-50 nm, respectively. In the near future, tender X-ray PCDI with sub-10 nm resolution is anticipated to potentially revolutionize the visualization of nanoscale structures and chemical states in various functional materials composed of light elements.
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