Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements

Autor: Cécile Ghouila-Houri, Ralph Sindjui, Mohammed Moutaouekkil, Omar Elmazria, Quentin Gallas, Eric Garnier, Alain Merlen, Romain Viard, Abdelkrim Talbi, Philippe Pernod
Jazyk: angličtina
Rok vydání: 2017
Předmět:
Zdroj: Proceedings, Vol 1, Iss 4, p 377 (2017)
Druh dokumentu: article
ISSN: 2504-3900
DOI: 10.3390/proceedings1040377
Popis: This paper presents a high sensitive micro-sensor designed for pressure measurements in a wide range around atmospheric pressure, for application in aerodynamics. The sensor is a temperature-resistance transducer operating with the Pirani effect, which states that below a certain pressure limit, the thermal conductivity of a gas is pressure-dependent. The sensor presents a wide measurement range between 10 kPa and about 800 kPa, in both constant current and constant temperature mode. The last mode enables high-sensitive measurements with a maximum of sensitivity around atmospheric pressure, enabling the use of the sensor for applications in aerodynamics and fluid dynamics, such as active flow control.
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