Compact On-Chip crystalline Resonator Integration with Etching Tapered Fiber Waveguide
| Autor: | Yue, Jun, Rong, Jiamin, Xing, Enbo, Xu, Weikang, Bai, Jiamin, Liu, Wenyao, Tang, Jun, Liu, Jun |
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| Rok vydání: | 2022 |
| Předmět: | |
| Druh dokumentu: | Working Paper |
| DOI: | 10.1364/AO.477764 |
| Popis: | Whispering-gallery mode crystalline resonators currently maintain the best quality factor (Q) record, however, compact on-chip packaging is still a challenge although various coupling architectures have been developed. Here, a chemical etching method is proposed to fabricate a miniaturized tapered fiber waveguide on silicon substrate. The Marangoni effect is implemented to reduce the surface roughness of the cone region. The optical loss of 0.1 dB/mm is obtained, and the Q of on-chip crystalline resonator exceeds 108. Additionally, TEC is implanted in the package to actively customize the temperature, and the temperature response of 18 pm/K is consistent with the theoretical calculation. Comment: The manuscript has an error display and needs to be corrected |
| Databáze: | arXiv |
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