| Autor: |
Lee, Chungha, Baek, Yoonseok, Hugonnet, Herve, Park, Yongkeun |
| Rok vydání: |
2021 |
| Předmět: |
|
| Druh dokumentu: |
Working Paper |
| DOI: |
10.1364/OL.446159 |
| Popis: |
Surface topology measurements of micro- or nanostructures is essential for both scientific and industrial applications. However, high-throughput measurements remain challenging in surface metrology. We present a single-shot full-field surface topography measurement using Kramers-Kronig holographic imaging and spectral multiplexing. Three different intensity images at different incident angles were simultaneously measured with three different colors, from which a quantitative phase image was retrieved using spatial Kramers-Kronig relations. A high-resolution topographic image of the sample was then reconstructed using synthetic aperture holography. Various patterned structures at the nanometer scale were measured and cross-validated using atomic force microscopy. |
| Databáze: |
arXiv |
| Externí odkaz: |
|
