Low Vibration Laboratory with a Single-Stage Vibration Isolation for Microscopy Applications

Autor: Voigtländer, Bert, Coenen, Peter, Cherepanov, Vasily, Borgens, Peter, Duden, Thomas, Tautz, F. Stefan
Rok vydání: 2018
Předmět:
Druh dokumentu: Working Paper
DOI: 10.1063/1.5008390
Popis: The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate is discussed. The optimization of the air spring system lead to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.
Databáze: arXiv