Single shot ultrafast laser processing of high-aspect ratio nanochannels using elliptical Bessel beams

Autor:	Meyer, R., Jacquot, M., Giust, R., Safioui, J., Rapp, L., Furfaro, L., Lacourt, P. -A., Dudley, J. M., Courvoisier, F.
Rok vydání:	2017
Předmět:	Physics - Applied Physics Physics - Optics
Druh dokumentu:	Working Paper
DOI:	10.1364/OL.42.004307
Popis:	Ultrafast lasers have revolutionized material processing, opening a wealth of new applications in many areas of science. A recent technology that allows the cleaving of transparent materials via non-ablative processes is based on focusing and translating a high-intensity laser beam within a material to induce a well-defined internal stress plane. This then enables material separation without debris generation. Here, we use a non-diffracting beam engineered to have a transverse elliptical spatial profile to generate high aspect ratio elliptical channels in glass of dimension 350 nm x 710 nm, and subsequent cleaved surface uniformity at the sub-micron level. Comment: 5 pages, 4 figures
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/1710.03678 Zobrazit plný text záznamu View this record from Arxiv