A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications

Autor:	Robin, Renaud, Touati, Salim, Segueni, Karim, Millet, Olivier, Buchaillot, Lionel
Rok vydání:	2008
Předmět:	Computer Science - Other Computer Science
Zdroj:	Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
Druh dokumentu:	Working Paper
Popis:	This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$\mu$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated. Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/0805.0934 Zobrazit plný text záznamu View this record from Arxiv