Plasma immersion ion implantation and deposition (PIIID) for the formation of hydrogen-free diamond-like carbon thin films
| Autor: | Anders, Simone |
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| Jazyk: | angličtina |
| Rok vydání: | 1998 |
| Zdroj: | Anders, Simone. (1998). Plasma immersion ion implantation and deposition (PIIID) for the formation of hydrogen-free diamond-like carbon thin films. Handbook of Plasma Immersion Ion Implantation and Deposition. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/6hk4r4zf |
| Databáze: | OpenAIRE |
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