Flash release - an alternative for releasing complex MEMS devices
| Autor: | Deladi, S., Krijnen, G.J.M., Elwenspoek, M.C., Svetovoy, V., Courtois, Bernard, Esashi, Masayoshi, Ionescu, Adrian, Karam, Jean Michel, Korvink, Jan, Markus, Karen |
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| Jazyk: | angličtina |
| Rok vydání: | 2004 |
| Zdroj: | Design, Test, Integration and Packaging of MEMS/MOEMS 2004: 12-14 May 2004, Cannes, France, 343-348 STARTPAGE=343;ENDPAGE=348;TITLE=Design, Test, Integration and Packaging of MEMS/MOEMS 2004 |
| Popis: | A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures. |
| Databáze: | OpenAIRE |
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