Surface morphology and secondary electron emission property of micro-needle structured diamond electrode fabricated by back sputtering

Autor:	Higa, Tsukasa, Ono, Shimon, Misu, Takayuki, Goto, Miki, Arai, Toshihiko
Jazyk:	japonština
Rok vydání:	2012
Předmět:	secondary electron emission MgO diamond electrode V-Q Lissajous micro-needle array breakdown voltage
Zdroj:	神奈川工科大学研究報告.B,理工学編. 36:41-44
ISSN:	0916-1902
Popis:	application/pdf The roughness of diamond surfaces were formed using O2 gas in a reactive ion etching (RIE) system. The electrode materials were used stainless steel (SUS) and MgO sintered ceramic. The diamond samples to be etched are positioned on the power electrode. After etching the diamond samples with O2 plasma, the roughness of diamond surfaces were observed with atomic force microscope (AFM). The breakdown voltages of diamond electrodes were measured under various Ne pressure with a V-Q Lissajous method. The micro-needle array on the diamond surface was fabricated at MgO electrode. The secondary electron emission coefficient in the case of MgO electrode is about two times higher than those in the case of SUS electrode.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::e90174f69d681fab9b7ebf2b19c43774 https://kait.repo.nii.ac.jp/records/1086 Zobrazit plný text záznamu