Elucidation of deterioration mechanism in protective film of collector mirror for EUV light source

Autor:	Honda, Yoshiyuki, Yanagida, Tatsuya, Shiraishi, Yutaka, Morita, Masayuki, Andou, Masahiko, Tomuro, Hiroaki, Matsuda, Akifumi, YOSHIMOTO, MAMORU
Jazyk:	japonština
Rok vydání:	2019
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::d5a0aa9abd9f888dd9055a22ee3aa1ab http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100806152 Zobrazit plný text záznamu