Is Microanalysis Possible in the Helium Ion Microscope?

Autor:	David C. Joy, Brendan Griffin
Rok vydání:	2011
Předmět:	Microscope business.industry Analytical chemistry chemistry.chemical_element Microanalysis Secondary electrons law.invention Ion Secondary Ion Mass Spectroscopy Optics chemistry law business Spectroscopy Instrumentation Helium Field ion microscope
Zdroj:	Microscopy and Microanalysis. 17:643-649
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927611000596
Popis:	Because the ability to perform some form of chemical microanalysis has become an essential feature for any microscope, it is necessary to investigate what options are available in the new “ORION” helium ion microscope (HIM). The HIM has the ability to visualize local variations in specimen chemistry in both the ion induced secondary electron and the Rutherford backscattered imaging modes, but this provides only limited and qualitative information. Quantitative, elementally specific, microanalysis could be performed in the HIM using secondary electron spectroscopy, Rutherford backscattered ion spectroscopy, or secondary ion mass spectroscopy, but while each of these options has promise, none of them can presently guarantee either reliable element identification or quantitative analysis across the periodic table.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fd3659389d81800285c3f01d14c7c009 https://doi.org/10.1017/s1431927611000596 Zobrazit plný text záznamu