Reliability of a focused ion beam repair on digital CMOS circuits

Autor: K. Van Doorselaer, R.M. Van Camp, I. Clemminck
Rok vydání: 2005
Předmět:
Zdroj: Proceedings of the 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis.
Popis: The usefulness of FIB technology for device modification is commonly recognized in the industry. Yet, very little is known concerning the reliability of these circuit changes. This paper presents the reliability assessment of a "standard" FIB repair on digital CMOS circuits. The overall conclusion is positive : the lifetime of a "standard" FIB repair is found to be more than a few months, which is largely sufficient for prototyping.
Databáze: OpenAIRE