Giant Resistivity Change of Transparent ZnO/Muscovite Heteroepitaxy
Autor: | Ying-Hao Chu, Yi Ting Hsieh, Chunli Zhang, Nien-Ti Tsou, Jhih Wei Chen, Yi-Chun Chen, Min Yen, Li Chang, Jiangyu Li, Hou Yung Cheng, Yu Hong Lai |
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Rok vydání: | 2020 |
Předmět: |
Fabrication
Materials science Nanostructure Silicon Oxide chemistry.chemical_element 02 engineering and technology Bending 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Engineering physics Piezoresistive effect 0104 chemical sciences chemistry.chemical_compound chemistry Gauge factor Electrical resistivity and conductivity General Materials Science 0210 nano-technology |
Zdroj: | ACS applied materialsinterfaces. 12(19) |
ISSN: | 1944-8252 |
Popis: | The piezoresistive effect has shown a remarkable potential for mechanical sensor applications and been sought for its excellent performance. A great attention was paid to the giant piezoresistive effect and sensitivity delivered by silicon-based nanostructures. However, low thermal stability and complicated fabrication process hinder their practical applications. To overcome these issues and enhance the functionalities, we envision the substantial piezopotential in a zinc oxide (ZnO)/muscovite (mica) heteroepitaxy system based on theoretical consideration and realize it in practice. High piezoresistive effect with giant change of resistivity (-80 to 240%) and large gauge factor (>1000) are demonstrated through mechanical bending. The detailed features of heteroepitaxy, electrical transport, and strain are probed to understand the mechanism of such a giant resistivity change. In addition, a bending model is established to reveal the distribution of strain. Finally, we demonstrate a flex sensor featuring high sensitivity, optical transparency, and two-segment sensing with a great potential toward practical applications. Such an oxide heteroepitaxy exhibits excellent piezoresistive properties and mechanical flexibility. In the near future, the importance of flex sensors will emerge because of the precise control in the automation industries, and our results lead to a new design in the field of flex sensors. |
Databáze: | OpenAIRE |
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