A Stacked Back Side-Illuminated Voltage Domain Global Shutter CMOS Image Sensor with a 4.0 μm Multiple Gain Readout Pixel †
Autor: | Junichi Nakamura, Alex Tsai, Isao Takayanagi, Ken Miyauchi, Naoto Yasuda, Yusuke Sawai, Mori Kazuya, Toshiyuki Isozaki, Toshinori Otaka, Hideki Owada |
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Jazyk: | angličtina |
Rok vydání: | 2020 |
Předmět: |
Materials science
single exposure multiple exposure lcsh:Chemical technology 01 natural sciences Biochemistry Signal Article Analytical Chemistry law.invention law Shutter 0103 physical sciences lcsh:TP1-1185 high full well capacity voltage domain global shutter Electrical and Electronic Engineering Image sensor Instrumentation stacked sensor 010302 applied physics back side illumination multiple gain readout Pixel business.industry 010401 analytical chemistry Rolling shutter high dynamic range Noise floor Atomic and Molecular Physics and Optics 0104 chemical sciences Capacitor low noise CMOS CMOS image sensor Optoelectronics business |
Zdroj: | Sensors Volume 20 Issue 2 Sensors, Vol 20, Iss 2, p 486 (2020) Sensors (Basel, Switzerland) |
ISSN: | 1424-8220 |
DOI: | 10.3390/s20020486 |
Popis: | A backside-illuminated complementary metal-oxide-semiconductor (CMOS) image sensor with 4.0 &mu m voltage domain global shutter (GS) pixels has been fabricated in a 45 nm/65 nm stacked CMOS process as a proof-of-concept vehicle. The pixel components for the photon-to-voltage conversion are formed on the top substrate (the first layer). Each voltage signal from the first layer pixel is stored in the sample-and-hold capacitors on the bottom substrate (the second layer) via micro-bump interconnection to achieve a voltage domain GS function. The two sets of voltage domain storage capacitor per pixel enable a multiple gain readout to realize single exposure high dynamic range (SEHDR) in the GS operation. As a result, an 80dB SEHDR GS operation without rolling shutter distortions and motion artifacts has been achieved. Additionally, less than &minus 140dB parasitic light sensitivity, small noise floor, high sensitivity and good angular response have been achieved. |
Databáze: | OpenAIRE |
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