Influence of microstructure and internal stress on the mechanical behavior of electroplated gold freestanding thin films
| Autor: | Thibaut Fourcade, P. Martins, Xavier Lafontan, Jean-Michel Desmarres, C. Malhaire, Cedric Seguineau, J. Martegoutte |
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| Přispěvatelé: | Centre National d'Études Spatiales [Toulouse] (CNES), Laboratoire Génie de Production (LGP), Ecole Nationale d'Ingénieurs de Tarbes, INL - Dispositifs Electroniques (INL - DE), Institut des Nanotechnologies de Lyon (INL), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Traitement et Communication de l'Information (LTCI), Télécom ParisTech-Institut Mines-Télécom [Paris] (IMT)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2010 |
| Předmět: |
010302 applied physics
Materials science Physics QC1-999 Modulus Nanoindentation Plasticity Microstructure 01 natural sciences 010305 fluids & plasmas Characterization (materials science) Secondary ion mass spectrometry 0103 physical sciences Forensic engineering Thin film Composite material [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics Electroplating ComputingMilieux_MISCELLANEOUS |
| Zdroj: | EPJ Web of Conferences, Vol 6, p 26009 (2010) EPJ Web of Conferences EPJ Web of Conferences, EDP Sciences, 2010, 6, pp.26009 |
| ISSN: | 2100-014X |
| Popis: | Mechanical properties of freestanding electroplated gold thin films were studied in relationship to their geometrical and microstructural properties. Three different techniques of characterization were used: nanoindentation, bulge tests and microtensile tests. Results were compared to literature and also discussed according to physical phenomena related to the elaboration process of the specimens like seed layer exodiffusion or internal stress state. The observed plasticity and failure mechanisms were found to be in good agreement with the literature and are consistent with the microstructure. The measured Young’s modulus is slightly higher than expected, and SIMS analysis is exploited to explain such a high value. |
| Databáze: | OpenAIRE |
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