High current liquid metal ion source using porous tungsten multiemitters

Autor:	Martin Tajmar, W. Grienauer, I. Vasiljevich
Rok vydání:	2010
Předmět:	Materials science Capillary action chemistry.chemical_element Nanotechnology Tungsten Liquid metal ion source Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Field electron emission chemistry Homogeneity (physics) Porosity Instrumentation Indium Common emitter
Zdroj:	Ultramicroscopy. 111:1-4
ISSN:	0304-3991
DOI:	10.1016/j.ultramic.2010.09.005
Popis:	We recently developed an indium Liquid-Metal-Ion-Source that can emit currents from sub-μA up to several mA. It is based on a porous tungsten crown structure with 28 individual emitters, which is manufactured using Micro-Powder Injection Molding (μPIM) and electrochemical etching. The emitter combines the advantages of internal capillary feeding with excellent emission properties due to micron-size tips. Significant progress was made on the homogeneity of the emission over its current-voltage characteristic as well as on investigating its long-term stability. This LMIS seems very suitable for space propulsion as well as for micro/nano manufacturing applications with greatly increased milling/drilling speeds. This paper summarizes the latest developments on our porous multiemitters with respect to manufacturing, emission properties and long-term testing.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c40a0537d26f9bc85c95450cce75785b https://doi.org/10.1016/j.ultramic.2010.09.005 Zobrazit plný text záznamu Full Text from ScienceDirect