Diamond membranes for X-ray masks
| Autor: | L. Schäfer, C.-P. Klages, J. Trube, B. Löchel, H.-L. Huber, H. Lüthje, H.-J. Schliwinski |
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| Přispěvatelé: | Publica |
| Jazyk: | angličtina |
| Rok vydání: | 1992 |
| Předmět: |
Materials science
masks optische Eigenschaft Material properties of diamond Chemical vapor deposition engineering.material Thermal expansion mechanische Eigenschaft X-ray lithography Oberflächenrauhigkeit Thermal conductivity Optics diamond Surface roughness Electrical and Electronic Engineering Composite material business.industry Gasphasenabscheidung Diamond Atmospheric temperature range Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials intrinsische Schichtspannung Röntgenlithographie mechanical property Membrane chemical vapour deposition Diamantfilm surface roughness engineering diamond film business plasma CVD intrinsic film stress |
| Popis: | Diamond is intensively under discussion as membrane material for X-ray masks. Its high optical transparency and its high thermal conductivity, its very low thermal expansion coefficient and its high Young's modulus favours diamond over other materials. The deposition of diamond layers was performed utilizing a plasma activated chemical vapor deposition in a substrate temperature range of 800 to 850°C. The optical transparency of diamond membranes at 630 nm, determined by spectral photometry, was found to be about 38% for a 3.6 μm thick membrane. The surface roughness of diamond layers, measured by an atomic force microscope, is about 50 nm. Further results of diamond mask blanks concerning thickness homogeneity and radiation stability are reported. |
| Databáze: | OpenAIRE |
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