Ultrasound Transmission Through the Back Cavities of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Arrays

Autor:	Alessandro S. Savoia, Domenico Giusti, Mark Andrew Shaw, Marco Ferrera, Fabio Quaglia
Přispěvatelé:	Savoia, A.S., Giusti, D., Shaw, M.A., Ferrera, M., Quaglia, F., Savoia, A. S., Giusti, D., Shaw, M. A., Ferrera, M., Quaglia, F.
Jazyk:	angličtina
Rok vydání:	2022
Předmět:	FEM Acoustic Matching Medical Imaging Non-Destructive Testing PMUT PZT Ultrasonic MEMS Cavitie
Popis:	We analyze and optimize the transmission of ultrasonic waves through the back-etched cavities of broadband PMUT arrays designed for medical imaging and non-destructive testing applications. We use a simple waveguide model to determine the acoustic impedance matching condition and investigate the effectiveness of the matching approach through Finite Element Modeling (FEM). We show that both the characteristic impedance and the finite elasticity of the cavity-filling material may affect the transducer bandwidth. The theoretical results are validated through electro-acoustic measurements carried out using 2MHz, 12-element, 2-D PMUT arrays.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::be82cf150f6d2eafcc52698e69872407 https://hdl.handle.net/11590/434276 Zobrazit plný text záznamu