Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements
| Autor: | Margot Morlans, Jerome Juillard, Jean Guerard |
|---|---|
| Přispěvatelé: | DPHY, ONERA, Université Paris Saclay [Châtillon], ONERA-Université Paris-Saclay, Laboratoire Génie électrique et électronique de Paris (GeePs), CentraleSupélec-Sorbonne Université (SU)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS) |
| Rok vydání: | 2021 |
| Předmět: |
[PHYS]Physics [physics]
Coupling Microelectromechanical systems Physics business.industry Weakly-coupled resonators Electrical engineering Gyroscope Characterization (materials science) law.invention MEMS [SPI]Engineering Sciences [physics] Resonator Quadrature error law Measurement uncertainty Electrical measurements Mechanical coupling Sensor characterization business |
| Zdroj: | 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Aug 2021, Virtual event, United States. ⟨10.1109/DTIP54218.2021.9568500⟩ |
| DOI: | 10.1109/dtip54218.2021.9568500 |
| Popis: | International audience; We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures. |
| Databáze: | OpenAIRE |
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