Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

Autor:	Sang-wuk Park, Keizo Kinoshita, Kenji Ishikawa, Silvia Armini, Gottlieb S. Oehrlein, Tatsuru Shirafuji, Keren J. Kanarik, Yasuhiro Morikawa, Richard A. Gottscho, Hisataka Hayashi, Tatsuo Ishijima, Nathan P. Marchack, Gert J. Leusink, Emilie Despiau-Pujo, Takahide Murayama
Přispěvatelé:	Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])
Jazyk:	angličtina
Rok vydání:	2019
Předmět:	010302 applied physics Physics and Astronomy (miscellaneous) Chemistry Perspective (graphical) General Engineering General Physics and Astronomy Nanotechnology 02 engineering and technology Surface reaction 021001 nanoscience & nanotechnology 01 natural sciences 0103 physical sciences Chemistry (relationship) [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics 0210 nano-technology Nanoscopic scale ComputingMilieux_MISCELLANEOUS
Zdroj:	Japanese Journal of Applied Physics Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2019, 58 (SE), pp.SE0801. ⟨10.7567/1347-4065/ab163e⟩ Japanese Journal of Applied Physics, 2019, 58 (SE), pp.SE0801. ⟨10.7567/1347-4065/ab163e⟩
ISSN:	0021-4922
Popis:	International audience
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bca17bb5242eaeeee079b4e77984bcef https://hal.univ-grenoble-alpes.fr/hal-02337524 Zobrazit plný text záznamu