Quantitative measurements of nanoscale permittivity and conductivity using tuning-fork-based microwave impedance microscopy
| Autor: | Yayu Wang, Keji Lai, Zhanzhi Jiang, Zhenqi Hao, Vishal Ganesan, Lu Zheng, Xiaoyu Wu, Di Wu |
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| Rok vydání: | 2018 |
| Předmět: |
Permittivity
Materials science FOS: Physical sciences Physics::Optics Applied Physics (physics.app-ph) 02 engineering and technology Dielectric 01 natural sciences law.invention law Mesoscale and Nanoscale Physics (cond-mat.mes-hall) 0103 physical sciences Tuning fork 010306 general physics Instrumentation Electrical impedance Condensed Matter - Materials Science Mesoscopic physics Condensed Matter - Mesoscale and Nanoscale Physics business.industry Materials Science (cond-mat.mtrl-sci) Physics - Applied Physics 021001 nanoscience & nanotechnology Microwave imaging Optoelectronics Field-effect transistor 0210 nano-technology business Microwave |
| Zdroj: | Review of Scientific Instruments. 89:043704 |
| ISSN: | 1089-7623 0034-6748 |
| DOI: | 10.1063/1.5022997 |
| Popis: | We report quantitative measurements of nanoscale permittivity and conductivity using tuning-fork (TF) based microwave impedance microscopy (MIM). The system is operated under the driving amplitude modulation mode, which ensures satisfactory feedback stability on samples with rough surfaces. The demodulated MIM signals on a series of bulk dielectrics are in good agreement with results simulated by finite-element analysis. Using the TF-MIM, we have visualized the evolution of nanoscale conductance on back-gated $MoS_2$ field effect transistors and the results are consistent with the transport data. Our work suggests that quantitative analysis of mesoscopic electrical properties can be achieved by near-field microwave imaging with small distance modulation. |
| Databáze: | OpenAIRE |
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