Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator
| Autor: | M. DeMiguel-Ramos, Mariano Barba, Teona Mirea, B. Díaz-Durán, Jimena Olivares, Marta Clement, Enrique Iborra, J.M. Escolano |
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| Rok vydání: | 2017 |
| Předmět: |
Streptavidin
Materials science Nanotechnology 02 engineering and technology 01 natural sciences chemistry.chemical_compound Resonator Materials Chemistry Electrical and Electronic Engineering Thin film Instrumentation Telecomunicaciones business.industry 010401 analytical chemistry Metals and Alloys 021001 nanoscience & nanotechnology Condensed Matter Physics Silane 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Amorphous solid chemistry Optoelectronics Surface modification Electrónica 0210 nano-technology business Biosensor Temperature coefficient |
| Zdroj: | Sensors and actuators B-Chemical, ISSN 0925-4005, 2016-09, Vol. 239 Archivo Digital UPM Universidad Politécnica de Madrid |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2016.09.079 |
| Popis: | We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying the pressure, the cathode power and the tem- perature of a two-step process based on depositing (00 • 2)-tilted AlN active layers over an (10 • 3)-oriented AlN seed layer. To minimize the influence of the temperature coefficient of frequency on the stability of the biosensor, we use insulating acoustic mirrors made of layers of SiO 2 and amorphous TaO x with non- /4 thicknesses, which enables to reduce the TCF to − 14 ppm/ ◦ C. The mass loading of the resonators with SiO 2 thin films results in a sensitivity of 1800 kHz/pg • cm 2 . Surface functionalization consists on the binding of silane groups on plasma oxidized SiO 2 surfaces. After a glutaraldehyde link, streptavidin is bonded to the surface to receive biotinylated receptors for several species. We test thrombin-binding aptamer (TBA29 against thrombin, and IgG antibody against immunoglobulin). The sensors response to species of different molecular weight like TBA-29 (9.75 kDa) or IgG antibody (150 kDa) is monitored. Finally, we assess the response of the biosensors to different thrombin concentrations (ranging from 4 nM to 270 nM) on surfaces functionalized with the TBA29 aptamer. |
| Databáze: | OpenAIRE |
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