Tunable Multilayers of Self-Organized Silica Nanospheres by Spin Coating
| Autor: | Alexis Fischer, J. Solard, Marc Lamy de la Chapelle, Nathalie Lidgi-Guigui, Sofiane Kasmi, Inga Tijunelyte |
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| Přispěvatelé: | Chimie, Structures et Propriétés de Biomatériaux et d'Agents Thérapeutiques (CSPBAT), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université Paris 13 (UP13)-Institut Galilée-Université Sorbonne Paris Cité (USPC), Laboratoire de Physique des Lasers (LPL), Université Paris 13 (UP13)-Centre National de la Recherche Scientifique (CNRS) |
| Rok vydání: | 2018 |
| Předmět: |
Materials science
Article Subject 02 engineering and technology engineering.material 010402 general chemistry 01 natural sciences law.invention Coating law lcsh:Technology (General) General Materials Science Lithography [PHYS]Physics [physics] Spin coating business.industry 021001 nanoscience & nanotechnology 0104 chemical sciences Volume fraction engineering lcsh:T1-995 Optoelectronics Nanosphere lithography Photolithography 0210 nano-technology business Layer (electronics) |
| Zdroj: | Journal of Nanomaterials Journal of Nanomaterials, Hindawi Publishing Corporation, 2018, 2018, pp.1-6. ⟨10.1155/2018/6075610⟩ Journal of Nanomaterials, Vol 2018 (2018) |
| ISSN: | 1687-4129 1687-4110 |
| DOI: | 10.1155/2018/6075610 |
| Popis: | International audience; The coating of fused silica by an organized layer of silica nanospheres (NS) is an important issue for the design of optical and topographic properties especially for lithography techniques such as nanosphere lithography (NSL) or nanosphere photolithography (NSPL). Here, the spin coating of NS dispersed in N, N-dimethylformamide (DMF) is studied. The role of the NS diameter, the spin-coating acceleration, and the volume fraction are the parameters to take into account for the formation and organization of NS in single or double closely packed layers. We propose an explanation for this behavior based on the transition between sedimentation and a viscous regime on the basis of the silica NS organization. |
| Databáze: | OpenAIRE |
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