Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology

Autor:	Nuria Barniol, J. L. Munoz-Gamarra, Arantxa Uranga
Jazyk:	angličtina
Rok vydání:	2014
Předmět:	Materials science Physics and Astronomy (miscellaneous) business.industry Nanotechnology Titanium nitride law.invention Ion Capacitor chemistry.chemical_compound CMOS chemistry Nanoelectronics law Electrode Optoelectronics Metal insulator metal capacitor business Voltage
Zdroj:	Dipòsit Digital de Documents de la UAB Universitat Autònoma de Barcelona
Popis:	We report experimental demonstrations of contact-mode nano-electromechanical switches obtained using a capacitor module based on metal-insulator-metal configuration of a standard commercial complementary metal oxide semiconductor technology. The developed 2 terminals Titanium Nitride switches operate at low voltages (∼10 V) thanks to its small gap (27 nm), showing an excellent ION/IOFF ratio (104) and abrupt behavior (5 mV/decade, one decade of current change is achieved with a 5 mV voltage variation). A switch configuration is also presented where using two electrodes three different contact mode states can be obtained, adding functionalities to mechanical switches configurations.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::85fee89931b239b7db533c4a09daf2d6 https://ddd.uab.cat/record/182944 Zobrazit plný text záznamu