Implementing an In Situ Surface Preparation Prior to Ni Deposition for Ni Salicide Processes

Autor:	Jon D. Cheek, Dean J. Denning, Stefan Zollner, Kyuh Wan Chang, Rich Gregory, Dharmesh Jawarani, Marc A. Rossow, J. Jiang, Scott Bolton
Rok vydání:	2007
Předmět:	In situ Materials science Nickel silicide Surface preparation Metallurgy General Materials Science Condensed Matter Physics Salicide Deposition (chemistry) Atomic and Molecular Physics and Optics
Zdroj:	Scopus-Elsevier
ISSN:	1662-9779
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7b6df8f37d0266f1e5e388abbe6a4ed2 https://doi.org/10.4028/www.scientific.net/ssp.134.19 Zobrazit plný text záznamu