Nano-patterning of gold thin film by thermal annealing combined with laser interference techniques
| Autor: | Isabelle Ledoux-Rak, Ngoc Diep Lai, Mai Hoang Luong, Alexander Lidiak, Quang Cong Tong, Minh Thanh Do |
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| Přispěvatelé: | Laboratoire de Photonique Quantique et Moléculaire (LPQM), École normale supérieure - Cachan (ENS Cachan)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS) |
| Rok vydání: | 2016 |
| Předmět: |
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Fabrication Materials science Physics::Optics Nanotechnology 02 engineering and technology General Chemistry Sputter deposition Photoresist 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 7. Clean energy Computer Science::Other 0104 chemical sciences [PHYS.QPHY]Physics [physics]/Quantum Physics [quant-ph] Interference (communication) Nano General Materials Science Thin film 0210 nano-technology Layer (electronics) ComputingMilieux_MISCELLANEOUS Plasmon |
| Zdroj: | Applied physics. A, Materials science & processing Applied physics. A, Materials science & processing, Springer Verlag, 2016, 122 (4), ⟨10.1007/s00339-016-9951-8⟩ |
| ISSN: | 1432-0630 0947-8396 |
| Popis: | We present an efficient method for fabrication of desired periodic metallic structures. By using the magnetron sputtering technique, the gold nano-layer was isotropically deposited onto a photoresist template, which had been previously fabricated by an interference technique. During a subsequent thermal annealing process, the gold coating layer melted and split allowing the photoresist core-template to evaporate and consequently leave a desired metal structure on the substrate surface. The proposed method exhibits advantages such as simplicity and low cost, which allows one to realize large-area plasmonic structures that are very promising for numerous applications, especially plasmonic-based photonic devices. |
| Databáze: | OpenAIRE |
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