Sensitive capacitive pressure sensors based on graphene membrane arrays
| Autor: | Tijmen W. de Jong, Richard van Rijn, Willemijn S. J. M. Peters, Dejan Davidovikj, Martin Lee, Johannes R. Renshof, DJ Dominique Wehenkel, Berend C. Hopman, Herre S. J. van der Zant, Peter G. Steeneken, Makars Šiškins |
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| Rok vydání: | 2020 |
| Předmět: |
Fabrication
Materials science Materials Science (miscellaneous) Capacitive sensing FOS: Physical sciences 02 engineering and technology Applied Physics (physics.app-ph) 010402 general chemistry 01 natural sciences lcsh:Technology Industrial and Manufacturing Engineering law.invention Printed circuit board law Nanosensor Mesoscale and Nanoscale Physics (cond-mat.mes-hall) Hardware_INTEGRATEDCIRCUITS Electrical and Electronic Engineering Nanoelectromechanical systems Condensed Matter - Mesoscale and Nanoscale Physics Graphene business.industry lcsh:T Physics - Applied Physics 021001 nanoscience & nanotechnology Condensed Matter Physics Pressure sensor Atomic and Molecular Physics and Optics 0104 chemical sciences Condensed Matter - Other Condensed Matter Membrane OA-Fund TU Delft lcsh:TA1-2040 Optoelectronics 0210 nano-technology business lcsh:Engineering (General). Civil engineering (General) Other Condensed Matter (cond-mat.other) |
| Zdroj: | Microsystems & Nanoengineering, Vol 6, Iss 1, Pp 1-9 (2020) Microsystems & Nanoengineering Microsystems & Nanoengineering, 6(1) |
| ISSN: | 2096-1030 |
| DOI: | 10.48550/arxiv.2003.08869 |
| Popis: | The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to $$47.8$$ aF Pa−1 mm−2, thereby outperforming the commercial sensors. Arrays of tiny graphene membranes exhibit excellent performance as pressure sensors, offering a competitive, low-cost alternative to commercially available systems. Graphene offers a durable and resilient material for sensors that generate a capacitive readout to pressure changes, but individual membranes are not sufficiently sensitive. Researchers led by Makars Siskins and Peter Steeneken of the Delft University of Technology in the Netherlands have devised a strategy for fabricating graphene sensor arrays that overcome this limitation. Their method yields millimeter-scale assemblies of 10,000 double-layered graphene membranes, which can in turn be connected to an inexpensive battery-powered circuit board. The authors demonstrate that this system can outperform a state-of-the-art commercial pressure sensor, and propose that further improvements to the design and fabrication of these arrays could improve their responsiveness by a full order of magnitude. |
| Databáze: | OpenAIRE |
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