| Autor: |
Marko Erich, Marko Gloginjić, Željko Mravik, Branislav Vrban, Štefan Čerba, Jakub Lüley, Vladimír Nečas, Vendula Filová, Karel Katovský, Ondrej Štastný, Srdjan Petrović |
| Rok vydání: |
2023 |
| Zdroj: |
27th International Conference on Applied Physics of Condensed Matter : APCOM 2022 : the book of abstracts; June 22-24; Strbske Pleso, Slovak Republic |
| Popis: |
6H-SiC samples have been implanted by 4 MeV C and Si ions in the (0001) channeling direction to the sets of multiple implantation fluences. These samples were analyzed via Elastic Backscattering Spectroscopy in the channeling mode (EBS/C) using 1.725 MeV proton beam, from which SiC amorphization depth profiles and averaged integral 6H-SiC amorphization have been obtained. The averaged integral 6H-SiC crystal amorphization vs implanted fluence dependence has been determined for both types of implanted ions. From these dependences, the 6H-SiC integral crystal amorphization vs. implanted fluence/type of implanted atom assessment model have been proposed. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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