Metal work-function-dependent barrier height of Ni contacts with metal-embedded nanoparticles to 4H-SiC

Autor: Jung-Joon Ahn, Min-Seok Kang, Kyoung-Sook Moon, Sang-Mo Koo
Rok vydání: 2012
Předmět:
Zdroj: Nanoscale Research Letters
NANOSCALE RESEARCH LETTERS(7)
ISSN: 1556-276X
DOI: 10.1186/1556-276x-7-75
Popis: Metal, typically gold [Au], nanoparticles [NPs] embedded in a capping metal contact layer onto silicon carbide [SiC] are considered to have practical applications in changing the barrier height of the original contacts. Here, we demonstrate the use of silver [Ag] NPs to effectively lower the barrier height of the electrical contacts to 4H-SiC. It has been shown that the barrier height of the fabricated SiC diode structures (Ni with embedded Ag-NPs) has significantly reduced by 0.11 eV and 0.18 eV with respect to the samples with Au-NPs and the reference samples, respectively. The experimental results have also been compared with both an analytic model based on Tung's theory and physics-based two-dimensional numerical simulations.
Databáze: OpenAIRE