Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces
| Autor: | Roberto Osellame, Francesca Bragheri, Rebeca Martinez Vazquez, Federico Sala, Petra Paiè |
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| Rok vydání: | 2021 |
| Předmět: |
thermal annealing
Fabrication Materials science fused silica lcsh:Mechanical engineering and machinery Polishing 02 engineering and technology Surface finish Residual 01 natural sciences Article law.invention 010309 optics law 0103 physical sciences Thermal Surface roughness lcsh:TJ1-1570 femtosecond laser micromachining Electrical and Electronic Engineering business.industry Mechanical Engineering 021001 nanoscience & nanotechnology Laser integrated optics Control and Systems Engineering roughness analysis Femtosecond Optoelectronics 0210 nano-technology business |
| Zdroj: | Micromachines Micromachines, Vol 12, Iss 180, p 180 (2021) Volume 12 Issue 2 |
| ISSN: | 2072-666X |
| DOI: | 10.3390/mi12020180 |
| Popis: | Femtosecond laser micromachining (FLM) of fused silica allows for the realization of three-dimensional embedded optical elements and microchannels with micrometric feature size. The performances of these components are strongly affected by the machined surface quality and residual roughness. The polishing of 3D buried structures in glass was demonstrated using different thermal annealing processes, but precise control of the residual roughness obtained with this technique is still missing. In this work, we investigate how the FLM irradiation parameters affect surface roughness and we characterize the improvement of surface quality after thermal annealing. As a result, we achieved a strong roughness reduction, from an average value of 49 nm down to 19 nm. As a proof of concept, we studied the imaging performances of embedded mirrors before and after thermal polishing, showing the capacity to preserve a minimum feature size of the reflected image lower than μ5μm. These results allow for us to push forward the capabilities of this enabling fabrication technology, and they can be used as a starting point to improve the performances of more complex optical elements, such as hollow waveguides or micro-lenses. |
| Databáze: | OpenAIRE |
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