Large 256-Pixel X-ray Transition-Edge Sensor Arrays With Mo/TiW/Cu Trilayers
| Autor: | Ilari Maasilta, Mika Prunnila, David Gunnarsson, M. R. J. Palosaari, K. M. Kinnunen, Leif Grönberg |
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| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
X-ray spectroscopy
Materials science Fabrication ta213 superconducting devices ta114 business.industry ta221 Time constant critical temperatures large format arrays Condensed Matter Physics Electronic Optical and Magnetic Materials Characterization (materials science) transition-edge sensors Nanosensor Optoelectronics Wafer Electrical and Electronic Engineering Transition edge sensor business Layer (electronics) materials analysis nanosensors |
| Zdroj: | Palosaari, M R J, Grönberg, L, Kinnunen, K M, Gunnarsson, D, Prunnila, M & Maasilta, I J 2015, ' Large 256-pixel X-ray transition-edge sensor arrays with Mo/TiW/Cu trilayers ', IEEE Transactions on Applied Superconductivity, vol. 25, no. 3, 2100304 . https://doi.org/10.1109/TASC.2014.2366641 |
| ISSN: | 1051-8223 |
| DOI: | 10.1109/TASC.2014.2366641 |
| Popis: | We describe the fabrication and electrical characterization of 256-pixel X-ray transition-edge sensor (TES) arrays intended for materials analysis applications. The processing is done on 6-in wafers, providing capabilities on a commercial scale. TES films were novel proximity coupled Mo/TiW/Cu trilayers, where the thin TiW layer in between aims to improve the stability of the devices by preventing unwanted effects such as Mo/Cu interdiffusion. The absorber elements were electrodeposited gold of thickness 2 μm. The single-pixel design discussed here is the so-called Corbino geometry. Most design goals were successfully met, such as the critical temperature, thermal time constant, and transition steepness. |
| Databáze: | OpenAIRE |
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