MEMS Variable Area Capacitor for Room Temperature Electrometry
| Autor: | Tod V. Laurvick, George C. Underwood |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry high resolution single-electron Charge (physics) lcsh:A Electrometer Capacitance law.invention Variable (computer science) Capacitor MEMS charge law Optoelectronics electrometer room temperature lcsh:General Works business MATLAB computer Voltage computer.programming_language |
| Zdroj: | Proceedings, Vol 2, Iss 13, p 1075 (2018) |
| ISSN: | 2504-3900 |
| Popis: | This paper introduces a new way to detect charge using MEMS variable capacitors for extremely sensitive, room temperature electrometry. It is largely based on the electrometers introduced by Riehl et al. [1] except variable capacitance is created by a changing area, not a changing gap. The new scheme will improve MEMS electrometers by eliminating the effects of squeeze-film damping and by theoretically increasing the maximum charge resolution by 70%. The charge conversion gain (the increase in output voltage per input unit charge) for this system is derived. The result show good agreement with MATLAB calculations. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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