Automated optical monitoring wavelength selection for thin-film filters
| Autor: | Julien Lumeau, Janis Zideluns, Detlef Arhilger, Harro Hagedorn, Fabien Lemarchand |
|---|---|
| Přispěvatelé: | RCMO (RCMO), Institut FRESNEL (FRESNEL), Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU), Buhler AG, Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
magnetron sputtering
business.industry Computer science Process (computing) Physics::Optics 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences thin film optical monitoring Atomic and Molecular Physics and Optics 010309 optics Wavelength Optics 0103 physical sciences optical filter [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic Sensitivity (control systems) Thin film 0210 nano-technology Optical filter business Refractive index Optical depth Selection (genetic algorithm) |
| Zdroj: | Optics Express Optics Express, Optical Society of America-OSA Publishing, 2021, 29 (21), pp.33398-331413. ⟨10.1364/OE.439033⟩ Optics Express, 2021, 29 (21), pp.33398-331413. ⟨10.1364/OE.439033⟩ |
| ISSN: | 1094-4087 |
| DOI: | 10.1364/OE.439033⟩ |
| Popis: | International audience; In this paper we study the wavelength selection process for optical monitoring of thin film filters. We first discuss the technical limitations of monitoring systems as well as the criteria defining the sensitivity of different wavelengths to thickness errors. We then present an approach that considers the best monitoring wavelength for each individual layer with a monitoring strategy selection process that can be fully automated. We finally validate experimentally the proposed approach on several optical filters of increasing complexity. Optical interference filters with close to theoretical performances are demonstrated. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|