Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements
| Autor: | Romain Viard, Quentin Gallas, Omar Elmazria, Abdelkrim Talbi, Alain Merlen, Eric Garnier, M. Moutaouekkil, Philippe Pernod, Cécile Ghouila-Houri, Ralph Sindjui |
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| Rok vydání: | 2017 |
| Předmět: |
Atmospheric pressure
business.industry Chemistry Acoustics Electrical engineering pressure sensors lcsh:A Aerodynamics Pressure sensor pirani sensors flow control law.invention Thermal conductivity Transducer Pressure measurement law Fluid dynamics Constant current lcsh:General Works MEMS sensors business |
| Zdroj: | Proceedings, Vol 1, Iss 4, p 377 (2017) |
| DOI: | 10.3390/proceedings1040377 |
| Popis: | This paper presents a high sensitive micro-sensor designed for pressure measurements in a wide range around atmospheric pressure, for application in aerodynamics. The sensor is a temperature-resistance transducer operating with the Pirani effect, which states that below a certain pressure limit, the thermal conductivity of a gas is pressure-dependent. The sensor presents a wide measurement range between 10 kPa and about 800 kPa, in both constant current and constant temperature mode. The last mode enables high-sensitive measurements with a maximum of sensitivity around atmospheric pressure, enabling the use of the sensor for applications in aerodynamics and fluid dynamics, such as active flow control. |
| Databáze: | OpenAIRE |
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