Parametric Study of Fracture Properties in Polycrystalline MEMS

Autor: Sarah Zerbini, F. Cacchione, Alberto Corigliano
Rok vydání: 2007
Předmět:
Zdroj: Politecnico di Milano-IRIS
Popis: A parametric numerical study aimed at understanding the influence of the average grain size on the mechanical behaviour of polysilicon films was addressed in this paper. A 2D geometrical model of the polycrystal coupled with a finite element (FE) procedure was employed. To simulate inter-granular and trans-granular crack propagation a cohesive crack model was used. The results were finally analyzed using the Weibull weakest link approach.
Databáze: OpenAIRE