A Technology-Computer-Aided-Design-Based Reliability Prediction Model for DRAM Storage Capacitors

Autor: Kwang Ho Ahn, Young-hoon Cho, Seongun Shin, Woo Young Chung, Woo Young Choi, Gyuhan Yoon
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: Micromachines
Volume 10
Issue 4
Micromachines, Vol 10, Iss 4, p 256 (2019)
ISSN: 2072-666X
DOI: 10.3390/mi10040256
Popis: A full three-dimensional technology-computer-aided-design-based reliability prediction model was proposed for dynamic random-access memory (DRAM) storage capacitors. The model can be used to predict the time-dependent dielectric breakdown as well as leakage current of a state-of-the-art DRAM storage capacitor with a complex three-dimensional structure.
Databáze: OpenAIRE