Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters
| Autor: | Adam Bouchaala, Richard R. A. Syms |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
Physics
Coupling coupled resonator Mechanical Engineering Acoustics Direct current mechanical filter MEMS Article Synchronization (alternating current) Resonator Band-pass filter Control and Systems Engineering TJ1-1570 Mechanical engineering and machinery Electrical and Electronic Engineering Mechanical filter Voltage Stiffness matrix |
| Zdroj: | Micromachines, Vol 12, Iss 1191, p 1191 (2021) Micromachines Micromachines; Volume 12; Issue 10; Pages: 1191 |
| Popis: | Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation. For high-order filters, there is a conflict between the transduction mechanism and the coupling arrangement needed for dynamic synchronization: it is not possible to achieve synchronization and tuning simultaneously using a single voltage. Here we propose a general solution, based on the addition of mass-loaded beams at the ends of the array. These beams deflect for direct current (DC) voltages, and therefore allow electrostatic tuning, but do not respond to in-band alternating current (AC) voltages and hence do not interfere with synchronization. Spurious modes generated by these beams may be damped, leaving a good approximation to the desired response. The approach is introduced using a lumped element model and verified using stiffness matrix and finite element models for in-plane arrays with parallel plate drives and shown to be tolerant of the exact mass value. The principle may allow compensation of fabrication-induced variations in complex filters. |
| Databáze: | OpenAIRE |
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