Conduction mechanisms and charge trapping control in SiO2 nanoparticle MIM capacitors

Autor: Albert Orpella, Bremnen Véliz, Sandra Bermejo, Joan Pons-Nin, Chenna Reddy Bheesayagari, Manuel Dominguez-Pumar
Přispěvatelé: Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica, Universitat Politècnica de Catalunya. Doctorat en Enginyeria Electrònica, Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Rok vydání: 2020
Předmět:
Zdroj: UPCommons. Portal del coneixement obert de la UPC
Universitat Politècnica de Catalunya (UPC)
ISSN: 0013-4686
Popis: © . This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ The objective of this paper is to present a charge trapping control method for MIM capacitors in whichthe dielectric is made of electrospray-deposited silica nanoparticles. The influence of the bias voltage onthe impedance spectra of the devices is analyzed, as well as the main conduction mechanisms along thestructure. The control method allows to monitor and control the long term drifts in the impedance ofthese devices, which are a result of the applied bias voltages. This work was supported by the Spanish Ministry MINECO un-der project RTI2018-098728-B-C33, by the European Space Agencyunder project ESA AO/1e8876/17/NL/CRS and by SENESCYT of therepublic of Ecuador under agreement 2016-AR5G8871
Databáze: OpenAIRE