Simulation in thin film technology
| Autor: | Turowski, Marcus, Jupé, Marco, Ehlers, Henrik, Melzig, Thomas, Pflug, Andreas, Ristau, Detlev, Lequime, Michel, Macleod, H. Angus |
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| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Direct simulation Monte Carlo
Real-time process control Materials science Design Optical films Thin films Monte Carlo method Multiple scale model Systems analysis Molecular dynamics Models Optical systems Rate-equation models Process control ddc:530 Kinetic Monte Carlo Statistical physics Thin film Density Functional Theory Konferenzschrift Particle-in-Cell Monte Carlo Optical properties Design for testability Multiple scale models Modeling Monte Carlo methods Thin-film technology Simulation and modeling Computational physics Quantum theory Dynamic Monte Carlo method Film growth Density functional theory Particle in cell Dewey Decimal Classification::500 | Naturwissenschaften::530 | Physik Layer (electronics) Atomistic simulations |
| Zdroj: | Proceedings of SPIE 9627 (2015) |
| Popis: | Simulation and modeling find more and more their way into thin film technology. Beside theoretical models for layer design, pre-production design analysis, and real time process control, atomistic simulation techniques gain of importance. Here, especially classical procedures such as Direct Simulation and Particle-in-Cell Monte Carlo (DSMC/PIC-MC), kinetic Monte Carlo (kMC) and Molecular Dynamics (MD) as well as quantum mechanical techniques based on Density Functional Theory (DFT) have to be mentioned. These methods are applied in order to investigate the material transport inside the coating facilities, the thin film growth in dependence of characteristic process conditions, and the optical and electronic thin film properties. By combination of these atomistic techniques in a suitable manner, a multiple scale simulation model can be realized for investigating the influence of specific process conditions on the resulting layer properties. The further extension of this virtual coater concept with respect to rate equation models enables the possibility to investigate also the interaction of laser irradiation with the modeled thin film structures. © 2015 SPIE. EC/CORNET ERA-NET/IGF 101 EN BMBF/13N13215 Ministry for Science and Culture of Lower Saxony Volkswagen Stiftung |
| Databáze: | OpenAIRE |
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