Dynamical plasma study during CaCu 3 Ti 4 O 12 and Ba 0.6 Sr 0.4 TiO 3 pulsed laser deposition by local thermodynamic equilibrium modelling
| Autor: | Jérôme Wolfman, Jörg Hermann, Jean-François Lagrange, Olivier Motret |
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| Přispěvatelé: | Research School of Earth Sciences [Canberra] (RSES), Australian National University (ANU), GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN - UMR 7347), Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Université de Tours (UT)-Centre National de la Recherche Scientifique (CNRS), Laboratoire d'Electrodynamique des Matériaux Avancés (LEMA), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Tours (UT)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Lasers, Plasmas et Procédés photoniques (LP3), Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU), Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université de Tours-Centre National de la Recherche Scientifique (CNRS), Université de Tours-Institut National des Sciences Appliquées - Centre Val de Loire (INSA CVL), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2010 |
| Předmět: |
Acoustics and Ultrasonics
Analytical chemistry 02 engineering and technology 01 natural sciences Fluence law.invention Pulsed laser deposition Plasma physics law 0103 physical sciences Thin film ComputingMilieux_MISCELLANEOUS 010302 applied physics [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] Chemistry [SPI.PLASMA]Engineering Sciences [physics]/Plasmas Plasma [CHIM.MATE]Chemical Sciences/Material chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Laser Surfaces Coatings and Films Electronic Optical and Magnetic Materials Surfaces Surface coating interfaces and thin films 13. Climate action Physical Sciences Instrumentation and measurement Electron temperature Plasma diagnostics Atomic physics 0210 nano-technology |
| Zdroj: | Journal of Physics D: Applied Physics Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (28), pp.285202. ⟨10.1088/0022-3727/43/28/285202⟩ Journal of Physics D: Applied Physics, 2010, 43 (28), pp.285202. ⟨10.1088/0022-3727/43/28/285202⟩ |
| ISSN: | 0022-3727 1361-6463 |
| Popis: | We performed space- and time-resolved plasma diagnostics during pulsed laser deposition of CaCu3Ti4O12 (CCTO) and Ba0.6Sr0.4TiO3 (BSTO) thin films. A KrF excimer laser irradiation at 248 nm with 25 ns pulse duration irradiates targets with a fluence varying from 1 to 2 J cm−2 under an oxygen pressure varying from 5 to 30 Pa. The plasma is shown to be optically thick and strongly non-uniform during the early expansion stage and the resonance lines Ca II 393 and 396 nm are strongly self-reversed during this time. Plasma temperature, electron density and relative elemental concentrations were obtained by comparing the experimental emission spectra with the spectral radiance computed for a non-uniform plasma in local thermal equilibrium. In this way, it was possible to evaluate very low concentrations of pollutants present in irradiated samples. |
| Databáze: | OpenAIRE |
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