Radiation pressure sensor
| Autor: | Karuza, M., Bozicevic, D., Cantatore, G., Vretenar, M., Koricic, Marko, Skala, Karolj, Car, Zeljka, Cicin-Sain, Marina, Sruk, Vlado, Skvorc, Dejan, Ribaric, Slobodan, Jerbic, Bojan, Gros, Stjepan, Vrdoljak, Boris, Mauher, Mladen, Tijan, Edvard, Katulic, Tihomir, Pale, Predrag, Grbac, Tihana Galinac, Fijan, Nikola Filip, Boukalov, Adrian, Cisic, Dragan, Gradisnik, Vera |
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| Přispěvatelé: | Complex Photonic Systems, MESA+ Institute, Skala, Karolj |
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
02 engineering and technology 01 natural sciences Displacement (vector) law.invention Optics law 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Sensor 010302 applied physics homodyne detection membrane brownian motion business.industry Mechanical impedance 22/2 OA procedure Michelson interferometer Radiation pressure Direct-conversion receiver Amplitude Mechanical resonator 020201 artificial intelligence & image processing Nanometre business Excitation |
| Zdroj: | 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020-Proceedings, 1890-1893 STARTPAGE=1890;ENDPAGE=1893;TITLE=2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020-Proceedings MIPRO |
| Popis: | Mechanical elements with dimensions in the nanometer range, at least in one direction, have been successfully employed as sensors in various devices. Their mechanical properties must be known with maximum precision in order to quantify the sensor response to external excitation. This often poses a significant challenge due to the mechanical fragility of the sensor elements. Here we present a measurement of the mechanical response of a 100 nm thick silicon nitride membrane. The external excitation force is provided by a laser beam modulated in amplitude, while the displacement of the membrane is measured by a Michelson interferometer with a homodyne readout. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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